Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis

Novel technical solutions and ideas for increasing the yield of solar semiconductor grade polycrystalline silicon processes have been analyzed. The predominant technology is currently still Siemens process including conversion (synthesized by carbon-thermal reduction quartzites) to trichlorosilane followed rectification hydrogen reduction. cost product can be cut down reducing synthesis costs through equipment improvement. Advantages, drawbacks production methods considered with respect four common processes: chloride exposure (direct chlorination, DC), homogeneous hydration tetrachlorosilane (conversion), (hydro chlorination silicon, HC), catalyzed dichlorosilane reaction (redistribution anti-disproportioning reaction). These remain in use are permanently improved. Catalytic play an important role on surface, understanding their mechanisms help find novel applications obtain new results. It has noted that indispensable components various designs recycling steps combined active distillation. They provide most complete utilization raw trichlorosilane, increase cost.